Company profile

Attolight AG is an emerging leader in defect inspection for advanced semiconductor materials and devices using cathodoluminescence spectroscopy. The company designs and manufactures automated solutions for semiconductor in-line defect inspection and high-end material research tools for industrial R&D and academia. Attolight's core expertise lies in the application of quantitative cathodoluminescence (q-CL), a non-destructive characterization method that produces spectroscopic data at the nanoscale and provides a deeper understanding of the structure of materials.

The company's technology has a wide variety of applications in different areas such as reliability and performance analysis of LEDs, GaN power transistors, deep UV emitters, lasers, solar cells, and biosensors. The company has a global presence with systems in Europe, Asia, and North America, and is headquartered at the EPFL Innovation Park in Lausanne (Switzerland). Attolight AG offers a wide range of products from CL add-ons for TEM to a SEM-CL multi-spectroscopies platform and in-line solutions. On the SEM-CL platform, two analysis modes are proposed: continuous and time-resolved. The continuous mode is mainly used for the identification of the composition, dopants, defects... in materials while the time-resolved mode allows to study the dynamics of electronic recombination. This mode requires a time-resolved detector such as a streak camera.

Role in the project

Attolight is involved in two complementary tasks centered around the characterization of dislocations and other material defects:

• Exploration of analytical & intrinsic aspects of dislocations,
• Enable fab-based near-line analytical characterization during R&D, ramp-up & production.